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| Description |
| This System has the capacity to delivering 30 liters per minutes of high purity &precision chemicals to a single or multiple tools. |
| Feature |
1. Low Cost-of-Ownership
2. Extremely Reliable
3. Space Saving Design
4. Easy Operation
5. High productivity
6. Extensive applications |
| Application |
| All chemicals in semiconductor & LCD & solar cell industry |
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